Fabrication of ultra-thin diamond films using hydrogen implantation and Lift-off technique

Abstract

The Lift-off technique based on high fluence (>3×10 16cm-2) implantation of hydrogen (H-) ions has been developed to increase the structural quality and electro-optical properties of the diamond thin membranes. According to the XTEM study the Vacuum Pressure - High Temperature (VPHT) treatment of the H2+ implanted (111) diamond plates at 1200-1600°C and 10-3Pa forms buried glassy like graphite layers in the implanted areas. High Pressure - High Temperature (HPHT) annealing at the same temperatures but under the pressure 4-8 GPa leads to the epitaxial growth of graphite in the buried implanted layers, which could not be etched chemically, but could be easily removed by etching in the anodic c..