Iron-rich particles in heavily contaminated multicrystalline silicon wafers and their response to phosphorus gettering
D Macdonald, SP Phang, FE Rougieux, SY Lim, D Paterson, DL Howard, MD de Jonge, CG Ryan
Semiconductor Science and Technology | IOP PUBLISHING LTD | Published : 2012
Awarded by Australian Research Council Future Fellowship
This research was undertaken on the x-ray Fluorescence Microscopy (XFM) beam-line at the Australian Synchrotron, Victoria, Australia. DM is supported by an Australian Research Council Future Fellowship FT110100680.