Journal article

Iron-rich particles in heavily contaminated multicrystalline silicon wafers and their response to phosphorus gettering

D Macdonald, SP Phang, FE Rougieux, SY Lim, D Paterson, DL Howard, MD de Jonge, CG Ryan

Semiconductor Science and Technology | IOP PUBLISHING LTD | Published : 2012

University of Melbourne Researchers

Grants

Awarded by Australian Research Council Future Fellowship


Funding Acknowledgements

This research was undertaken on the x-ray Fluorescence Microscopy (XFM) beam-line at the Australian Synchrotron, Victoria, Australia. DM is supported by an Australian Research Council Future Fellowship FT110100680.