Conference Proceedings

Ion-implantation and analysis for doped silicon slot waveguides

L Deam, N Stavrias, KK Lee, JC McCallum

COMMAD 2012 | IEEE | Published : 2012

DOI: 10.1109/COMMAD.2012.6472368

University of Melbourne Researchers

Jeffrey McCallum Author Physics

Keywords

Science & Technology

Materials Science

Materials Science, Multidisciplinary

Engineering, Electrical & Electronic

Physical Sciences