Conference Proceedings

Raman study on the phase transformations of the meta-stable phases of Si induced by indentation

BC Johnson, N Stavrias, B Haberl, LBB Aji, JE Bradby, JC McCallum, JS Williams

Conference on Optoelectronic and Microelectronic Materials and Devices Proceedings COMMAD | IEEE | Published : 2012

Abstract

Raman scattering is used to investigate the metastable Si phases formed by indentation. The indent strain, phase distribution and the kinetics of the phase transformations are examined. © 2012 IEEE.

University of Melbourne Researchers