Nanomechanical Torsional Resonators for Frequency-Shift Infrared Thermal Sensing
XC Zhang, EB Myers, JE Sader, ML Roukes
Nano Letters | AMER CHEMICAL SOC | Published : 2013
Awarded by DARPA/MTO
We thank L.G. Villanueva for stimulating discussions, X. L. Feng for a critical reading of the manuscript, R. B. Karabalin for help in the optical measurement, D. Chi for assistance in electron beam lithography, and J. E. Sader acknowledges support from the Australian Research Council grants scheme. We are grateful for the support from DARPA/MTO under the Grant W31P4Q-10-1-0006.