MeV ion implantation doping of diamond

Abstract

Diamond-based semiconductor devices offer the promise of operation at high temperatures and under extreme radiation conditions. An essential step in the drive towards operational diamond-based electronic devices is the ability to controllably and reproducibly dope the diamond. Ion implantation is the method of choice for such doping because it offers precise control of the dopant concentration and spatially selective doping is achievable using standard masking techniques. However, compared to silicon, the doping of diamond is complicated by the tendency of the diamond to relax to graphite upon thermal annealing. Furthermore, even if graphitization can be avoided, the compensation of dopants ..