Journal article

Obtaining model-independent growth rates from experimental data of dry thermal oxidation of silicon

Y Leong Yeow, Jong-Leng Liow, Yee-Kwong Leong

AICHE Journal | WILEY | Published : 2014

DOI: 10.1002/aic.14375

University of Melbourne Researchers

Keywords

Dioxide
Engineering, Chemical
Science & Technology
Engineering
Deal-Grove Model
Silicon Oxidation
Integral Equation
Oxide Films
Tikhonov Regularization
Kinetics
Oxygen
Technology
Numerical Differentiation