Conference Proceedings
Buried picolitre fluidic channels in single-crystal diamond
MA Strack, BA Fairchild, ADC Alves, P Senn, BC Gibson, S Prawer, AD Greentree
Proceedings of SPIE the International Society for Optical Engineering | SPIE-INT SOC OPTICAL ENGINEERING | Published : 2013
DOI: 10.1117/12.2035099
Abstract
We report the generation of sub-surface nanouidic channels from single crystal diamond. To make the channels, we used a combination of ion-beam induced damage and annealing to create a buried, etchable graphitic layer in the diamond. Either laser or focussed ion-beam milling was then used to connect to that layer, and subsequent electro-chemical etching used to remove the graphitic material. The channels had dimensions 100-200 nm thick, 100 μm wide and 300 μm long, which have a total volume around 3 pL; and were around 3 μm below the diamond surface. © 2013 Copyright SPIE.
Grants
Funding Acknowledgements
B.C.G. acknowledges the support of an ARC Future Fellowship (FT110100225), and A.D.G. acknowledges the support of an ARC QEII Fellowship (DP0880466).