Conference Proceedings
Silicon nitride light pipes for image sensors
T Tut, P Duane, WN Ye, M Wober, KB Crozier
Proceedings of SPIE the International Society for Optical Engineering | SPIE-INT SOC OPTICAL ENGINEERING | Published : 2010
DOI: 10.1117/12.860777
Abstract
We describe a means for improving the performance of CMOS image sensors using vertical waveguides, known as light pipes. We describe experimental results on the etching of silicon nitride pillars, and the fabrication of photodiodes. © 2010 SPIE.