Silicon nitride light pipes for image sensors
Turgut Tut, Peter Duane, Winnie N Ye, Munib Wober, Kenneth B Crozier, EL Dereniak (ed.), JP Hartke (ed.), PD LeVan (ed.), RE Longshore (ed.), AK Sood (ed.), M Razeghi (ed.), R Sudharsanam (ed.)
DETECTORS AND IMAGING DEVICES: INFRARED, FOCAL PLANE, SINGLE PHOTON | SPIE-INT SOC OPTICAL ENGINEERING | Published : 2010
We describe a means for improving the performance of CMOS image sensors using vertical waveguides, known as light pipes. We describe experimental results on the etching of silicon nitride pillars, and the fabrication of photodiodes. © 2010 SPIE.