Silicon photodetectors integrated with vertical silicon nitride waveguides as image sensor pixels: Fabrication and characterization
Turgut Tut, Yaping Dan, Peter Duane, Winnie N Ye, Fatih Degirmenci, Young Yu, Munib Wober, Kenneth B Crozier
Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures | A V S AMER INST PHYSICS | Published : 2014
This work was supported by Zena Technologies and by Harvard University. Fabrication was performed in the Harvard Center for Nanoscale Systems (CNS), which was supported by the National Science Foundation. The authors thank Ling Xie, J. D. Deng, Yuan Lu, Steve Hickman, and David Lange for technical support and invaluable discussions.