Conference Proceedings

Nanofabrication processes for single-ion implantation of silicon quantum computer devices

RP McKinnon, FE Stanley, TM Buehler, E Gauja, K Peceros, LD Macks, M Mitic, V Chan, AS Dzurak, RG Clark, CY Yang, DN Jamieson, S Prawer, LB Kish (ed.)

BioMEMS and Smart Nanostructures | SPIE-INT SOC OPTICAL ENGINEERING | Published : 2001