Journal article

Direct imaging of end-of-range compaction in ion beam irradiated silica waveguides by atomic force microscopy

ML von Bibra, A Roberts, P Mulvaney, ST Huntington

Journal of Applied Physics | AMER INST PHYSICS | Published : 2000


The end-of-range compaction induced by megaelectronvolt proton irradiation of fused silica has been imaged by atomic force microscopy. A maximum surface compaction of 50 nm was measured for an ion dose of 4.0×10 ions cm . A linear correlation between ion dose and compaction has been observed in the range of 1.0 to 4.0×10 ions cm . When the samples were left at room temperature over a period of several months, the amount of compaction appeared to decrease significantly which suggests some temporal annealing of the waveguides has occurred. © 2000 American Institute of Physics. 15 -2 16 -2