Fabrication of planarised conductively patterned diamond for bio-applications
Wei Tong, Kate Fox, Kumaravelu Ganesan, Ann M Turnley, Olga Shimoni, Phong A Tran, Alexander Lohrmann, Thomas McFarlane, Arman Ahnood, David J Garrett, Hamish Meffin, Neil M O'Brien-Simpson, Eric C Reynolds, Steven Prawer
MATERIALS SCIENCE & ENGINEERING C-MATERIALS FOR BIOLOGICAL APPLICATIONS | ELSEVIER SCIENCE BV | Published : 2014
The development of smooth, featureless surfaces for biomedical microelectronics is a challenging feat. Other than the traditional electronic materials like silicon, few microelectronic circuits can be produced with conductive features without compromising the surface topography and/or biocompatibility. Diamond is fast becoming a highly sought after biomaterial for electrical stimulation, however, its inherent surface roughness introduced by the growth process limits its applications in electronic circuitry. In this study, we introduce a fabrication method for developing conductive features in an insulating diamond substrate whilst maintaining a planar topography. Using a combination of micro..View full abstract
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The authors wish to acknowledge the contribution of Dr. Marta Redrado Notivoli, Chemistry and Chemical Engineering Department, University of Melbourne for collecting AFM data and Ms Rosemary Cicione for her help in proofreading the final manuscript. The authors wish to acknowledge the Electron Microscopy unit of Bio21 Institute, The University of Melbourne for assistance with electron microscopy. Melbourne Centre for Nanofabrication is also acknowledged for the use of Oxford PlasmaLab 100 ICP-RIE General system. NICTA is funded by the Australian Government as represented by the Department of Broadband, Communications and the Digital Economy and the Australian Research Council through the ICT Centre of Excellence Program. This research was supported by the Australian Research Council (ARC) through its Special Research Initiative (SRI) in Bionic Vision Science and Technology grant to Bionic Vision Australia (BVA). The research was also supported by an interdisciplinary seed grant from the Melbourne Materials Institute.