Complex Permittivity Measurements in 1–30 GHz Using a MEMS Probe
CD ABEYRATHNE, E Skafidas
Journal of Microelectromechanical Systems | IEEE | Published : 2015
This work was supported by the Melbourne Centre for Nanofabrication, Clayton, VIC, Australia, through the Victorian Node, Australian National Fabrication Facility. Subject Editor C. Mastrangelo.