Conference Proceedings
Microfabricated solid immersion lens with metal aperture
DA Fletcher, D Simanovskii, D Palanker, KB Crozier, CF Quate, GS Kino, FE Goodson
2000 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS | IEEE | Published : 2000
Abstract
We demonstrate spatial resolution better than λ/10 in the infrared with a transmittance of 10-3 using a microfabricated solid immersion lens and metal aperture.