Conference Proceedings

Nano-Porous Silicon antireflection coatings for microlens application

TD James, JS Milne, AJ Keating, G Parish, CA Musca, JM Dell, L Faraone

Proceedings of the 2006 International Conference on Nanoscience and Nanotechnology, ICONN | Published : 2006


Nano-porous silicon is investigated as antireflection coating for silicon microlenses. The effect of non-planar silicon surfaces on nano-porous silicon thin film uniformity is examined. V-groves were micromachined in [100] orientated silicon and subsequently anodised in a HF solution to produce nano-porous silicon. The results show for nano-porous silicon fabricated on heavily doped p-type material the electric field has a negligible effect on the uniformity. The orientation of the anodised crystal planes does affect both the nano-porous silicon morphology and anodisation rate. A high quality nano-porous silicon antireflection coating on a planar surface is also demonstrated. © 2006 IEEE.

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