Regrowth zones in laser annealed, radiation damaged diamond

Abstract

Focused laser annealing of ion implanted diamond with a 15 μm diameter laser spot produces a variety of effects that depend on the power density of the laser. Channeling contrast muscopy (CCM) provides a relatively straightforward, rapid method to analyse the annealed regions of the diamond to characterize the effects. In order of increasing laser power density, effects that are observed include: regrowth of the end of range damage of the ion implantation, formation of a buried graphitic layer and complete graphitization of the surface of the diamond down to the bottom of the original damage layer. Information provided by CCM leads to an understanding of the causes of these effects and provi..