Focused MeV light ion beams for high resolution channeling contrast imaging

Abstract

The technique of Nuclear Microscopy, utilizing a focused ion probe of typically MeV H+ or He+ ions, can produce images where the contrast depends on typical Ion Beam Analysis (IBA) processes. The probe forming lens system usually utilizes strong focusing, precision magnetic quadrupole lenses and the probe is scanned over the target to produce images. Since the convergence angle of the focused probe is small, images can be produced where the contrast depends on the backscattering of dechanneled ions from defects in crystals. Originally, this imaging technique was developed to utilize backscattered particles with incident beam currents typically of a few nA, and the technique became known as C..