He and H mubeam damage, swelling and annealing in diamond

Abstract

The effects of scanned 2 MeV He+ and 1.4 MeV H+ mubeam irradiation on unimplanted and P implanted diamond were characterized. Although diamond was found to be resistant to lattice defect production, it was found to swell very rapidly in comparison with other materials, giving rise to serious swelling induced dechanneling at scan edges at relatively low doses (1017/cm2 for 2 MeV He+). mubeams annealed the damage due to a 1.5 μm deep phosphorus implantation at a dose of 1015 P+/cm2. The implantation damage was reduced at a dose of (1.6 × 1017/cm2) by up to 21% for 2 MeV He+ irradiation, up to 16% for high flux 1.4 MeV H+ irradiation and 12% for low flux H+ irradiation. For the choice of analys..