Journal article
High-quality single-crystal diamond-graphitediamond membranes and devices
VP Popov, AK Gutakovskii, VA Antonov, SN Podlesnyi, IN Kupriyanov, YN Palyanov, SV Rubanov
International Journal of Nanotechnology | Inderscience | Published : 2015
Abstract
Implantation of hydrogen ions into synthetic single-crystal diamonds followed by subsequent high-temperature annealing and anodic etching of implanted crystals was used to obtain structurally perfect 30-nm thick diamond membranes with optically active NV-centres (area up to several tens mm2) appropriate for use in integral magnetometers and quantum-informatics optoelectronic circuits.
Grants
Funding Acknowledgements
The work was supported by RFBR Grant No. 13-07-00688. The part of the work was carried out with the support of the Ministry of Education and Science of the Russian Federation (Project No. 14.621.21.0004) and RSCF (Project No. 14-22-00143).