Journal article

Optimal ADF STEM imaging parameters for tilt-robust image quantification

KE MacArthur, AJ D'Alfonso, D Ozkaya, LJ Allen, PD Nellist



An approach towards experiment design and optimisation is proposed for achieving improved accuracy of ADF STEM quantification. In particular, improved robustness to small sample mis-tilts can be achieved by optimising detector collection and probe convergence angles. A decrease in cross section is seen for tilted samples due to the reduction in channelling, resulting in a quantification error, if this is not taken into account. At a smaller detector collection angle the increased contribution from elastic scattering, which initially increases with tilt, can be used to offset the decrease in the TDS signal.

University of Melbourne Researchers


Awarded by European Union

Awarded by Australian Research Council

Awarded by Engineering and Physical Sciences Research Council

Funding Acknowledgements

K.E. MacArthur gratefully acknowledges the EPSRC for Ph.D. funding and Johnson-Matthey for both financial support and scientific guidance and discussions that provided the incentive for this investigation. The authors would also like to acknowledge S. Van Aert, A. De Backer and G. Martinez for their useful discussions towards investigating this area. The research leading to these results has received funding from the European Union Seventh Framework Programme under Grant agreement 312483 - ES-TEEM2 (Integrated Infrastructure Initiative-13). This research was supported under the Australian Research Council's Discovery Projects funding scheme (Projects DP110102228 and DP140102538) and its DECRA funding scheme (Project DE130100739). The authors also acknowledge A. J. MacArthur for her invaluable help towards the writing of this paper.