Conference Proceedings
Development of nanowire devices with quantum functionalities
M Stuiber, LHW Van Beveren, BC Johnson, WM Weber, A Heinzig, J Beister, DN Jamieson, JC McCallum
2014 Conference on Optoelectronic and Microelectronic Materials and Devices COMMAD 2014 | IEEE | Published : 2014
Abstract
We describe a process to fabricate doped silicon nanowires in a 4-terminal setup.