Conference Proceedings
Development Of Nanowire Devices With Quantum Functionalities
Michael Stuiber, Laurens H Willems van Beveren, Brett C Johnson, Walter M Weber, Andre Heinzig, Juergen Beister, David N Jamieson, Jeffrey C McCallum, L Faraone (ed.), M Martyniuk (ed.)
2014 CONFERENCE ON OPTOELECTRONIC AND MICROELECTRONIC MATERIALS AND DEVICES (COMMAD 2014) | IEEE | Published : 2014
Abstract
We describe a process to fabricate doped silicon nanowires in a 4-terminal setup.